JPH0137729Y2 - - Google Patents
Info
- Publication number
- JPH0137729Y2 JPH0137729Y2 JP4660984U JP4660984U JPH0137729Y2 JP H0137729 Y2 JPH0137729 Y2 JP H0137729Y2 JP 4660984 U JP4660984 U JP 4660984U JP 4660984 U JP4660984 U JP 4660984U JP H0137729 Y2 JPH0137729 Y2 JP H0137729Y2
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- drain tank
- cup
- spin cup
- coating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011248 coating agent Substances 0.000 claims description 20
- 238000000576 coating method Methods 0.000 claims description 20
- 239000007788 liquid Substances 0.000 claims description 12
- 239000000126 substance Substances 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- SCPYDCQAZCOKTP-UHFFFAOYSA-N silanol Chemical compound [SiH3]O SCPYDCQAZCOKTP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4660984U JPS60161468U (ja) | 1984-03-30 | 1984-03-30 | 塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4660984U JPS60161468U (ja) | 1984-03-30 | 1984-03-30 | 塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60161468U JPS60161468U (ja) | 1985-10-26 |
| JPH0137729Y2 true JPH0137729Y2 (en]) | 1989-11-14 |
Family
ID=30561166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4660984U Granted JPS60161468U (ja) | 1984-03-30 | 1984-03-30 | 塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60161468U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2674756B2 (ja) * | 1987-09-10 | 1997-11-12 | 九州日本電気株式会社 | 半導体製造装置 |
-
1984
- 1984-03-30 JP JP4660984U patent/JPS60161468U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60161468U (ja) | 1985-10-26 |
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